6. Compare the uses of a standard E-T SE detector, an in-lens SE detector, a BSE

Question

6. Compare the uses of a standard E-T SE detector, an in-lens SE detector, a BSE detector, and an EDS detector in an SEM. What does each detector provide in terms of useful information (chemical, structural, topographical, etc.) and at what spatial resolution? What are the physical processes that limit the spatial resolution in each case? Fill in the table below (1 pt each) a. Full technique name (spelling out abbreviation) Typical Spatial Resolution (order ofand/or topographical, this magnitude) and whatmost commonly used for limits it? Of structural, chemical, detector/technique is evaluating: E-T SE In Lens SE BSE EDS b. Using the equations developed in class to substantiate your answer, why does EDS sample a larger excitation volume than BSE? (10 points)

Explanation / Answer

Full technique name(Spelling out abbreviation)

Typical Spatial Resolution (order of magnitude) And Maximum limit.

Of structural/chemical/Topological

(This detector technique is commonly used for detecting).

E-T-SE

Everhart Thornley secondary Electron

detector

Working Distance(WD)

( 5mm to 15 mm)

Structure: It is mounted on the wall of the specimen chamber and it views the specimen laterally.

Use: used for detection of imaging at long WD ( SE2 & SE3 detection)

In Lens SE

In Lens Secondary

Electron Detector

Working Distance

( 5mm to 15 mm)

Structure: ILD include more surface information than ET-SE detector

Use: This technique is commonly used of detecting SE1.

BSE

Backscattered Electron Detector

Short working distance.

Structure: It is located below the final lens and views the specimen from above. This position offers very large solid angle for the detection of BSE

Use: for detecting

crystal orientation and magnetic contrast type II etc.

EDS

Energy Dispersive X-ray Spectrometer Detector

Larger working distance

Structure: It has a thin silicon crystal doped with lithium so that the central intrinsic region is sandwiched between a thin p-type layer and thin n-type layer.

Use: detecting x-ray signal form larger WD.

Full technique name(Spelling out abbreviation)

Typical Spatial Resolution (order of magnitude) And Maximum limit.

Of structural/chemical/Topological

(This detector technique is commonly used for detecting).

E-T-SE

Everhart Thornley secondary Electron

detector

Working Distance(WD)

( 5mm to 15 mm)

Structure: It is mounted on the wall of the specimen chamber and it views the specimen laterally.

Use: used for detection of imaging at long WD ( SE2 & SE3 detection)

In Lens SE

In Lens Secondary

Electron Detector

Working Distance

( 5mm to 15 mm)

Structure: ILD include more surface information than ET-SE detector

Use: This technique is commonly used of detecting SE1.

BSE

Backscattered Electron Detector

Short working distance.

Structure: It is located below the final lens and views the specimen from above. This position offers very large solid angle for the detection of BSE

Use: for detecting

crystal orientation and magnetic contrast type II etc.

EDS

Energy Dispersive X-ray Spectrometer Detector

Larger working distance

Structure: It has a thin silicon crystal doped with lithium so that the central intrinsic region is sandwiched between a thin p-type layer and thin n-type layer.

Use: detecting x-ray signal form larger WD.

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