(MEMS) 1-Describe the properties of positive and negative photoresists in photol
ID: 2322994 • Letter: #
Question
(MEMS)
1-Describe the properties of positive and negative photoresists in photolithography.
2)E-beam lithography
a) Writes patterns using EUV wavelengths.
b)Writes patterns using electron beams.
c)Writes whole wafers in a single exposure.
d)Uses immersion techniques to achieve high resolution
3) Laser Interference lithography
A)Writes periodic patterns written by interfering two or more beams of light.
B)Can only be used on a metal substrate.
C)Is a contact patterning method.
D)Is prone to stitching errors.
4) Silicon properties do not include
A) A Direct band gap semiconductor
B) P-doping
C) N-doping
D) Fourteen electrons
E) Four nearest neighbor atoms in a 3D crystalline structure.
Explanation / Answer
2-B
3-A
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