1. An accelerometer consists a parallel plate capacitor suspended by four beams.

Question

1. An accelerometer consists a parallel plate capacitor suspended by four beams. The center plate has an area of 1x1 mm2, the four beams are each 500 um long, 5 um wide, and 0.3 ?m in thickness. The Young's modulus of the beams is 120 GPa a) If the spacing between the bottom of the plate and the substrate (air gap) is 2 pum, what is the capacitance value of the capacitor? (Assume air permittivity ?,-8.85 x 10-14 F/cm) b) What is the spring force constant Km of the parallel plate capacitor? c) Under an applied force normal to the plate, the gap changes from 2 to 1 pum. Calculate the value of the force

Explanation / Answer

a) capacitabca C=E0A/d

Here E0=8.85×10^-14f/cm

Area A=1.1mm^2

C=(8.85×10^-14)×(1.1)/0.002

C=-2.269F

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